Particle Protector Filter
P.P.F
Features & Benefits
- CVD, Dry Etcher, Diffusion tools has vacuum sensor to control the constant pressure continously. Lots of by-products depose on the surface of diaphragm inside Baratron or any vacuum Sensor. It make a drift of pressure because of process contamination.
- Prohibition to introduce contamination into Pressure Gauges
- Pre-Prohibition to mis-operation of Pressure Gauge
- Extension of replace to Pressure Gauge
- Reduction of Maintenance Expense of Pressure Gauge
Configuration
- Two stage zone structure for effective protect Pressure Sensor
- Effective Preventive from 200~500㎛ size Particle
- Prevent ZERO DRIFT phenomenon at ETCH process
- Increase YIELD by Protection for Pressure sensor.
Optional
- 1/2_VCR Fitting (Male) : Gauge Connection / Any connection type available
- 1/2_VCR Fitting (Female) : Valve Connection / Any connection type available
- Insulator (Silicon)
- Heater (50°C / 100°C / 150°C)
