EPI INSTRUMENTS is dedicated to being the worldwide leader in providing the repair service for fluid and power management subsystems, instruments an components for the measurement in the semiconductor market and in this markets,
EPI is specialize in repairing MKS, ASTEX, ENI and AE 's RF/uW/Ozone Generator and Pressure Gauge.

EPI Repair Services has been the leader in semiconductor, LCD and LED's component repair.
We have grown to be the independent component repair company in the world. Beginning with our philosophy of quality testing every
component we repair, and continuing through our commitment to service, no other repair company in the world can match EPI's depth
and variety of repair capabilities.

Repair Item Scope

• Microwave Power Generators
• RF Power Generators
• DC Power Generators
• Reactive Gas Generators
• Ozone Generators

Core Service Products

• 

  Ozone Care

  Includes ozone cell replacement / cleaning, upgrade of electronics and refurbish 'like new'. Options designed to maximize
  uptime and extend lifetime (MKS:AX8407,AX8200,AX8560,AX8430,AX8406 SU-01 etc, SUMIMOTO : SU-01 etc, EBARA etc)

• 

  RPS Care

  Includes plasma block replacement / cleaning, upgrade of electronics and refurbish 'like new' options designed to maximize uptime
  and extend lifetime (AX7670, AX7657, AX7685 etc)

• 

  RF·DC·MW Generator Care

  Provides 'on/off toll' troubleshooting of ENI / AE product.

  Increases uptime, reduces NTF and customer-held inventory(Spectrum, OEM, DCG, RFG etc) pressure & Flow calibration - NIST traceable
  calibration synchronized customers PM schedule Maximizes uptime with significant cost savings

• 

  Revolution III

  AX7659, AX7695-20, AX7695-40, AX7695 AMAT-03, AX7695 LAM-10, AX7695 PSK-01, AX7695 PSK-10, AX7695 TEL-01

Global product support

EPI factory trained field engineers provide service coverage for all MKS, Astex, ENI and AE products.

• 22 dedicated field engineers
• Average 10+ years of direct industry experience
• Recertified every 2 years
• Available 24/7 for telephone consultations < 1- hour telephone response
• Common world wide date base tracks field visits, upgrades and repairs
• Detailed service reports after repair